Article details

Title: Tunable Bandpass MEMS Filters for Millimeter Wave Applications: Design and Results
Author(s): Alexandru Takacs   Dan Neculoiu   Dan Vasilache   Alexandru Muller   Patrick Pons   Laurent Bary   Pierre-François Calmon   Herve Aubert   Robert Plana   

Abstract: This paper addresses the design and modeling of millimeter wave tunable filters using CoPlanar Waveguide (CPW) quarter wavelength stubs and MEMS (Micro-Electro-Mechanical-Systems) switches. In order to design bandpass tunable MEMS filters, an accurate design methodology based on the transmission line theory is presented. The tunable behavior is achieved using original MEMS switches: Two Cantilever Shunt Switch (TCSS). The overall structures, including TCSS, have been manufactured using dielectric membrane, in order to minimize the insertion losses. The obtained simulation and experimental results confirm the proposed design methodology and indicate very good performances in millimeter wave band.

Keywords: MEMS, bandpass filter, tunable filter, millimeter wave, coplanar waveguide.

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